加速度计电路设计

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1、 秘密 摘 要本课题在剖析集成加速度传感器ADXL50和ADXL150芯片的根底上，完成信号处理电路的提取和系统的分析。采用新顺公司提供的4微米BiPMOS工艺的晶体管模型参数对ADXL50信号处理电路进行了分析、计算和模拟，利用电子24所提供的4微米CMOS工艺的晶体管模型参数对ADXL150信号处理电路进行了分析、计算和模拟。ADXL50信号处理电路包括基准电压源、偏置电流源、振荡器、方波发生器、缓冲器、解调器、预放大电路、自测试电路和缓冲放大器九个局部。ADXL150信号处理电路包括时钟产生电路、高频载波产生器、缓冲放大器、解调滤波电路、基准电压源电路、基准电流源电路和自检测电路七个局部

2、。两个系统都具有自测试功能，电路系统输出电压信号与加速度信号成正比关系。本文在对ADXL50系统稳定性分析和Matlab软件系统仿真的根底上，完成电路模块功能和性能指标确实定，为信号处理电路提供了设计依据。对各局部单元电路进行了原理分析和理论计算、电路模拟以及优化，模拟结果说明单元电路所实现的功能符合系统设计要求。将各局部单元电路进行了整体Hspice模拟，其模拟结果符合设计要求。在提取的ADXL150电路和传感器信号输出原理分析的根底上，完成电路的模块的划分和功能确实定，并完成局部电路的模拟和优化。这些研究结果为芯片的进一步研制奠定了根底。所研究的信号处理电路既可用于外表微机械加工工艺制作的

3、差分电容式传感器进行信号处理，实现单片集成，又可用于对体硅工艺制作的差分电容式传感器进行信号处理，实现混合集成。关键词 加速度传感器；信号处理电路；Hspice模拟AbstractBased on the dissection of the integrated accelerometer chip and extraction of the circuit diagrams, the signal processing circuits of ADXL50 were analyzed and simulated with spice parameters provided by Xinshu

4、n Company and the signal processing circuits of ADXL150 were analyzed and simulated with spice parameters provided by 24th Institute of Electronics.The ADXL50 circuit system consists of reference voltage source, bias current source, oscillator, squarewave generator, buffer, demodulator, preamplifier

5、, self-test circuit and buffer amplifier. The ADXL150 circuit system consists of clock generator, high frequency carrier wave generator, buffer, demodulator and filter, reference voltage source, reference current source and self-test circuit. There are self-test functions in these systems. The outpu

6、t voltage signals are proportional to the acceleration signal. According to the analysis of ADXL50 system stability and Matlab system emulation, basic specifications of parts of circuit were achieved, which offered design foundation for the signal processing circuits. Then all parts of circuits were

7、 analyzed and simulated separately. After the simulation results of each part of circuits were gotten, system simulation and optimization by Hspice were conducted in order to verify whole circuit system validity. Results show that the circuit system meets the design demands. Based on the extraction

8、of ADXL150 circuit diagrams and analysis of sensor output principles, the system was divided into seven parts and basic specifications of parts were achieved. Moreover, some parts of circuit were simulated and optimized with Hspice. These results establish basis for following research.These circuit

9、systems can be used for the differential capacitive accelerometer made not only by surface-micromachined process, but also by bulk- micromachined process to realize monolithic or hybrid integration.Keywords accelerometer; signal processing circuit; Hspice simulation 目 录摘要IAbstractII第1章 绪论11.1 引言11.2

10、 国外研究现状和分析11.3 国内研究现状和分析41.4 本课题的研究目的和意义51.5 本课题的主要内容6第2章 系统分析与仿真72.1 引言72.2 频率特性分析72.2.1 加速度传感器原理72.2.2 低通滤波器原理122.3 差动电容式加速度传感器132.3.1 ADXL50和ADXL150传感器信号输出原理132.3.2 静电力调节原理162.4 系统稳定性分析172.5 MATLAB系统仿真192.6 本章小结23第3章 ADXL50电路原理分析与模拟243.1 引言243.2 系统电路的原理分析与模拟243.3 各局部电路的原理分析与模拟253.3.1 基准电压源253.3.2

11、 偏置电流源293.3.3 多谐振荡器313.3.4 方波发生器353.3.5 缓冲器363.3.6 解调电路383.3.7 预放大电路413.3.8 缓冲放大器493.3.9 自测试局部电路523.4 系统电路整体模拟543.5 本章小结55第4章 ADXL150电路原理分析564.1 引言564.2 系统电路的原理分析564.3 模块电路的原理分析574.3.1 时钟产生电路574.3.2 解调滤波电路614.3.3 基准电压源624.3.4 高频载波发生器634.3.5 基准电流源644.3.6 自检测电路644.4 本章小结65结论66参考文献67附录171附录281附录383附录48